Semiconductors
Advanced Semiconductor Equipment
Location: Singapore
Scope: EPC For Cleanroom & Process Installation
Client: ASETS
Highlights
- Cleanroom Class: ISO 6 & 7 (Class 1,000 & 10,000 )
- Cleanroom Area : 500m2
- Process Cooling Water System & CDA System
- Specialty And Bulk Gas System
- Process Vacuum System
- Scrubber Exhaust System
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